Wafer Manufacturing (PDF)
Shaping of Single Crystal Silicon Wafers
(Sprache: Englisch)
Presenting all the major stages in wafer manufacturing, from
crystals to prime wafers.
This book first outlines the physics, associated metrology,
process modelling and quality requirements and the goes on to
discuss wafer forming and wafer surface...
crystals to prime wafers.
This book first outlines the physics, associated metrology,
process modelling and quality requirements and the goes on to
discuss wafer forming and wafer surface...
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Presenting all the major stages in wafer manufacturing, from
crystals to prime wafers.
This book first outlines the physics, associated metrology,
process modelling and quality requirements and the goes on to
discuss wafer forming and wafer surface preparation
techniques. The whole is rounded off with a chapter on the
research and future challenges in wafer manufacturing.
crystals to prime wafers.
This book first outlines the physics, associated metrology,
process modelling and quality requirements and the goes on to
discuss wafer forming and wafer surface preparation
techniques. The whole is rounded off with a chapter on the
research and future challenges in wafer manufacturing.
Autoren-Porträt von Imin Kao, Chunhui Chung
Imin Kao, is Professor in the Department of Mechanical Engineering at the State University of New York in Stony Brook, USA. He is Faculty Director of the Undergraduate College in Information and Technology Studies. He holds three patents, and his research foci include robotic manipulation with soft contacts and smart contact surface technology using MEMS.Chunhui Chung, is Associate Professor in the Department of Mechanical Engineering at the National Cheng Kung University in Taiwan.
Bibliographische Angaben
- Autoren: Imin Kao , Chunhui Chung
- 2020, 1. Auflage, 304 Seiten, Englisch
- Verlag: John Wiley & Sons
- ISBN-10: 1118696255
- ISBN-13: 9781118696255
- Erscheinungsdatum: 31.12.2020
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