Rare-Earth Implanted MOS Devices for Silicon Photonics / Springer Series in Materials Science Bd.142 (PDF)
Microstructural, Electrical and Optoelectronic Properties
(Sprache: Englisch)
The book concentrates on the microstructural, electric and optoelectronic properties of rare-earth implanted MOS structures and their use as light emitters in potential applications. It describes the structural formation processes in the gate oxide during...
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Produktinformationen zu „Rare-Earth Implanted MOS Devices for Silicon Photonics / Springer Series in Materials Science Bd.142 (PDF)“
The book concentrates on the microstructural, electric and optoelectronic properties of rare-earth implanted MOS structures and their use as light emitters in potential applications. It describes the structural formation processes in the gate oxide during fabrication and under operation, how this microstructure development will affect the electrical device performance and how both microstructure and electrical characteristics determine the optoelectronic features of the light emitters. However, most of the discussed physical processes as well as the described fabrication methods and device characterization techniques are of general interest and are beyond the scope of this type of light emitter. The book will be of value to engineers, physicists, and scientists dealing either with Si based photonics in particular or optoelectronic device fabrication and characterization in general.
Bibliographische Angaben
- Autoren: Lars Rebohle , Wolfgang Skorupa
- 2010, 2010, 174 Seiten, Englisch
- Verlag: Springer-Verlag GmbH
- ISBN-10: 3642144470
- ISBN-13: 9783642144479
- Erscheinungsdatum: 20.10.2010
Abhängig von Bildschirmgrösse und eingestellter Schriftgrösse kann die Seitenzahl auf Ihrem Lesegerät variieren.
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- Grösse: 6.40 MB
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Englisch
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