Temperature Measurement during Millisecond Annealing
Ripple Pyrometry for Flash Lamp Annealers
(Sprache: Englisch)
Denise Reichel studies the delicate subject of temperature measurement during lamp-based annealing of semiconductors, in particular during flash lamp annealing. The approach of background-correction using amplitude-modulated light to obtain the sample...
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Denise Reichel studies the delicate subject of temperature measurement during lamp-based annealing of semiconductors, in particular during flash lamp annealing. The approach of background-correction using amplitude-modulated light to obtain the sample reflectivity is reinvented from rapid thermal annealing to apply to millisecond annealing. The author presents a new method independent of the lamp operation to obtain this amplitude modulation and derives a formula to describe the process. Further, she investigates the variables of the formula in depth to validate the method's suitability for background-corrected temperature measurement. The experimental results finally proof its power for elevated temperatures.Inhaltsverzeichnis zu „Temperature Measurement during Millisecond Annealing “
Introduction and motivation.- Fundamentals of flash lamp annealing of shallow Boron-doped Silicon.- Fundamentals of surface temperature measurements during flash lamp annealing.- Concept of ripple pyrometry during flash lamp annealing.- Ripple pyrometry for flash lamp annealing.- Experiments - ripple pyrometry during flash lamp annealing.- Closing discussion and outlook.
Autoren-Porträt von Denise Reichel
Dr. Denise Reichel currently works in technical sales and consulting for temperature measurement needs and as a lecturer for thermodynamics and heat and mass transfer.
Bibliographische Angaben
- Autor: Denise Reichel
- 2016, 1st ed. 2015, XXV, 112 Seiten, 112 farbige Abbildungen, Masse: 14,8 x 21 cm, Kartoniert (TB), Englisch
- Verlag: Springer, Berlin
- ISBN-10: 3658113871
- ISBN-13: 9783658113872
- Erscheinungsdatum: 14.01.2016
Sprache:
Englisch
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