Micro Process Engineering
Fundamentals, Devices, Fabrication, and Applications
(Sprache: Englisch)
This edition of CMOS-MEMS was originally published in the successful series Advanced Micro & Nanosystems . A close look at enabling technologies is taken, the first section on MEMS featuring an introduction to the challenges and benefi ts of three-dimensional silicon
processing.
processing.
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This edition of CMOS-MEMS was originally published in the successful series Advanced Micro & Nanosystems . A close look at enabling technologies is taken, the first section on MEMS featuring an introduction to the challenges and benefi ts of three-dimensional silicon
processing.
processing.
Klappentext zu „Micro Process Engineering “
This edition of 'Micro Process Engineering' was originally published in the successful series 'Advanced Micro & Nanosystems'.Authors from leading industrial players and research institutions present a concise and didactical introduction to Micro Process Engineering, the combination of microtechnology and process engineering into a most promising and powerful tool for revolutionizing chemical processes and industrial mass production of bulk materials, fine chemicals, pharmaceuticals and many other products.The book takes the readers from the fundamentals of engineering methods, transport processes, and fluid dynamics to device conception, simulation and modelling, control interfaces and issues of modularity and compatibility. Fabrication strategies and techniques are examined next, focused on the fabrication of suitable microcomponents from various materials such as metals, polymers, silicon, ceramics and glass.The book concludes with actual applications and operational aspects of micro process systems, giving broad coverage to industrial efforts in America, Europe and Asia as well as laboratory equipment and education.
Inhaltsverzeichnis zu „Micro Process Engineering “
PREFACEPROCESS ENGINEERING METHODS AND MICROSYSTEM TECHNOLOGYMOMENTUM AND HEAT TRANSFER IN MICROSIZED DEVICESTRANSPORT PROCESSES AND EXCHANGE EQUIPMENTMULTIPHASE FLOW, EVAPORATION, AND CONDENSATION AT THE MICROSCALEGENERATION AND MULTIPHASE FLOW OF EMULSIONS IN MICROCHANNELSCHEMICAL REACTIONS IN CONTINUOUS-FLOW MICROSTRUCTURED REACTORSDESIGN PROCESS AND PROJECT MANAGEMENTSIMULATION AND ANALYTICAL MODELING FOR MICROREACTOR DESIGNINTEGRATION OF SENSORS AND PROCESS-ANALYTICAL TECHNIQUESMICROFABRICATION IN METALS AND POLYMERSSILICON MICROFABRICATION FOR MICROFLUIDICSMICROFABRICATION IN CERAMICS AND GLASSINDUSTRIAL APPLICATIONS OF MICROCHANNEL PROCESS TECHNOLOGY IN THE UNITED STATESINDUSTRIAL APPLICATIONS IN EUROPEINDUSTRIAL PRODUCTION PLANTS IN JAPAN AND FUTURE DEVELOPMENTSLABORATORY APPLICATIONS OF MICROSTRUCTURED DEVICES IN STUDENT EDUCATIONSUBJECT INDEX
Autoren-Porträt
Norbert Kockmann is scientific group leader at the Institute of Microsystems Engineering (IMTEK - Design of Microsystems), Universityof Freiburg. After his diploma of aerospace engineering at TU Munich, he joined in 1991 Bremen University, Chair of Technical Themodynamics, Heat and Mass Transfer. After finishing his PhD work on fouling in heat exchangers in 1996, he worked as a project manager at Messer Griesheim GmbH for the plant engineer-ing of air separation units and a syngas plant. His research interests include the design, fabrication, and experimental characterization of micro-structured devices as well as the fundamental processes in microsystems.
Bibliographische Angaben
- 2013, XXII, 507 Seiten, 1 farbige Abbildungen, 255 Schwarz-Weiss-Abbildungen, Masse: 17,1 x 24,1 cm, Kartoniert (TB), Englisch
- Herausgegeben: Norbert Kockmann, Oliver Brand, Gary K. Fedder, Christofer Hierold, Jan G. Korvink, Osamu Tabata
- Verlag: Wiley-VCH
- ISBN-10: 3527335005
- ISBN-13: 9783527335008
- Erscheinungsdatum: 24.04.2013
Sprache:
Englisch
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