Deulin, E: MECHANICS & PHYSICS OF PRECISE

Contents; Preface; About the Authors; 1 Using Precise Mechanisms in Modern Vacuum Technological Equipment;References; 2 Typical Vacuum Mechanisms; 2.1 Functions of Vacuum Mechanisms 2.2 Rotary-Motion Feedthroughs; 2.3 Linear-Motion Feedthrough; 2.4 Manipulators; 2.5 Micro Mechanisms; References; 3 Friction in Vacuum; 3.1 Friction Coefficients of Different Materials in Atmosphere and in Vacuum; 3.2 Dry Friction Laws in Atmosphere and in Vacuum;3.3 The Main Factors, which Determine the Surface Coverage at "Dry" Friction; 3.3.1 Influence of the Residual Pressure and Temperature; 3.3.2 Influence of the Sliding Velocity and Roughness Geometry; 3.4 The Theoretical Analysis of Friction in the Different Ranges of Coverage; 3.4.1 Viscous Component of a Friction Force; 3.4.2 Capillary Component of a Friction Force; 3.4.3 Adhesive-Viscous Friction; 3.4.4 Adhesive Friction; 3.4.5 Cohesion Friction; 3.5 The Possibility to Use the Described Method for the Calculation of the Friction Coefficient of Real Surfaces; 3.6 Exchange of Gases at Friction in Vacuum References; 4 Matrix Method of the Design of New Mechanisms Structure; 4.1 The Stages of the Matrix Method of the Mechanisms Generation; 4.2 The List of the Parameters of Vacuum Mechanisms Which Are Used in Matrix Analysis; 4.2.1 The First (Highest) Level Parameters; 4.2.2 The Second Level Parameters; 4.2.3 The Third Level Parameters; 4.2.4 The Fourth Level Parameters; 4.3 Algorithm of the Matrix Method of the Generation of New Mechanisms; References; 5 Precision of Vacuum Mechanisms; 5.1 The Constituents of Errors of Vacuum Mechanisms; 5.2 The Basic Positions of the Precision Theory of Vacuum Mechanisms; 5.2.1 Open-Loop-Controlled Drive; 5.2.2 Completely Loop-Controlled Drive; 5.3 Determination of the Error Components of Different Origins; 5.3.1 Calculation of the Kinematic Component of the Error; 5.3.2 Calculation of the Error from Elastic Deformations; 5.3.3 Calculation of the Error Caused by the Deformation of theThin-Wall

Prof. Evgueni A.DEULIN Evgueni A.Deulin born in Moscow on 9.07. 1938. He earned his first doctoral degree (PhD) 'Ultra High Vacuum (UHV) Mechanism Optimal Design"in 1987. He earned his second doctoral degree (Dr.Sci)"Theory ofUHV Mechanisms Creation" in 1987. From 1988 he works as a professor of Mechanical Engineering Department of BMSTU and leads student Vacuum Technology Research Group. His pupils earned 22 PhD works, During 1964-1989 E.A.Deulin researched all main types of UHV mechanisms and designed 54 types of standard (USSR) mechanical vacuum feedthroughs, including precise UHV harmonic rotary feedthrough, long travel UHV linear non-coaxial ones, precise (in nano scale range) multi coordinate magnetic rheology drives etc. He is author of 46 patents of USSR and Russia. E.A. Deulin researched the process of gases exchange at friction in vacuum. He was the first who theoretically ( in 1996) togather with prof. J de Segovia and with Dr. R. Nevshoupa described and experimentally researched the mechanically stimulated gases solution process.. In 1997 E.A. Deulin first time theoretically described phenomenon of friction force decreasing in UHV for " smooth" surfaces. Today this work transforms into "Theory of Smooth Surfaces Dry Friction". E.A. Deulin is the author ofmore than 250 scientific publications He is the supervisor of postgraduate students group and he was a winner of title "The Best Student Research Supervisor " in BMSTU. Prof. Yuri V. PANFILOV Yuri V. Panfilov born in Moscow on 02.01 . 1948. He earned his BS (engineer) degree in 1968 in Bauman Moscow State Technical University(BMSTU). He earned his first doctoral degree (PhD) "Research of Elastomer Feedthroughs for Vacuum Technological Equipement Automation"in 1970. He earned his second doctoral degree (Dr.Sci)" New Methods of Nanoscale Structures Creation" in 1988. From 1988 he works as a professor of Mechanical Engineering Department of BMSTU and heads the Chair of Bauman Moscow State Technical