Materials Processing by Cluster Ion Beams (PDF)
History, Technology, and Applications
(Sprache: Englisch)
This book discusses the physics, materials science, surface engineering issues, and nanotechnology capabilities of cluster beam processing. Written by the originator of the gas cluster ion beam (GCIB) concept, the text describes the development of sources...
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This book discusses the physics, materials science, surface engineering issues, and nanotechnology capabilities of cluster beam processing. Written by the originator of the gas cluster ion beam (GCIB) concept, the text describes the development of sources for producing cluster beams from solid materials, the engineering characteristics of gas cluster ion beam equipment, and surface processing techniques for smoothing, shallow implantation, and preparation of high-quality thin films. It offers an overview of ion beam technologies, from the discovery of monomer ions to the introduction of GCIBs.
Autoren-Porträt von Isao Yamada
Isao Yamada was the originator of the concept for the processing of materials by gas cluster ion beams. He is presently a visiting professor at the Graduate School of Engineering of the University of Hyogo in Japan. He is professor emeritus at Kyoto University, where he was director of the Ion Beam Engineering Experimental Laboratory. He received his Ph.D in electrical engineering from Kyoto University and has held visiting scientist appointments at the FOM Institute in Amsterdam, the Massachusetts Institute of Technology, Cornell University, and Northwestern University. For the past 40 years, his principal areas of research have ranged from fundamental physics to practical applications of materials processing by ion beams, with particular emphasis on very low-energy ion-solid interactions.
Bibliographische Angaben
- Autor: Isao Yamada
- 2015, 260 Seiten, Englisch
- Verlag: Taylor & Francis
- ISBN-10: 1498711766
- ISBN-13: 9781498711760
- Erscheinungsdatum: 20.08.2015
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