Fundamentals of Semiconductor Manufacturing and Process Control / Wiley - IEEE (PDF)

A practical guide to semiconductor manufacturing from process
control to yield modeling and experimental design

Fundamentals of Semiconductor Manufacturing and Process Control
covers all issues involved in manufacturing microelectronic devices
and circuits, including fabrication sequences, process control,
experimental design, process modeling, yield modeling, and CIM/CAM
systems. Readers are introduced to both the theory and practice of
all basic manufacturing concepts.

Following an overview of manufacturing and technology, the text
explores process monitoring methods, including those that focus on
product wafers and those that focus on the equipment used to
produce wafers. Next, the text sets forth some fundamentals of
statistics and yield modeling, which set the foundation for a
detailed discussion of how statistical process control is used to
analyze quality and improve yields.

The discussion of statistical experimental design offers readers a
powerful approach for systematically varying controllable process
conditions and determining their impact on output parameters that
measure quality. The authors introduce process modeling concepts,
including several advanced process control topics such as
run-by-run, supervisory control, and process and equipment
diagnosis.

Critical coverage includes the following:

* Combines process control and semiconductor manufacturing

* Unique treatment of system and software technology and management
of overall manufacturing systems

* Chapters include case studies, sample problems, and suggested
exercises

* Instructor support includes electronic copies of the figures and
an instructor's manual

Graduate-level students and industrial practitioners will benefit
from the detailed exami?nation of how electronic materials and
supplies are converted into finished integrated circuits and
electronic products in a high-volume manufacturing
environment.

An Instructor's Manual presenting detailed solutions to all the
problems in the book is available from the Wiley editorial
department.

An Instructor Support FTP site is also available.