Fabrication of Superconductor-Insulator-Superconductor Devices for Heterodyne Mixer Applications with Electron Beam Lithography (PDF)
Superconductor-Insulator-Superconductor (SIS) junction devices are used as state of the art frequency mixers for radio astronomical heterodyne receivers and enable near quantum limited sensitivity up to about 1 THz.
In this work an enhanced...
In this work an enhanced...
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Superconductor-Insulator-Superconductor (SIS) junction devices are used as state of the art frequency mixers for radio astronomical heterodyne receivers and enable near quantum limited sensitivity up to about 1 THz.
In this work an enhanced fabrication scheme for SIS junction devices has been developed and implemented into regular device fabrication at KOSMA. Electron beam lithography in combination with a chemical mechanical planarization (CMP) process has considerably improved submicron junction area reproducibility and electrical device characteristics. The fabrication scheme demonstrates enough development potential for future THz frequency SIS mixer designs.
In this work an enhanced fabrication scheme for SIS junction devices has been developed and implemented into regular device fabrication at KOSMA. Electron beam lithography in combination with a chemical mechanical planarization (CMP) process has considerably improved submicron junction area reproducibility and electrical device characteristics. The fabrication scheme demonstrates enough development potential for future THz frequency SIS mixer designs.
Bibliographische Angaben
- 2004, 178 Seiten, Deutsch
- Verlag: Cuvillier Verlag
- ISBN-10: 3736910932
- ISBN-13: 9783736910935
- Erscheinungsdatum: 09.06.2004
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