Development and Assessment of Wafer Transport Sequencing Rules for Clustertools
Development of Sequencing Rules for Clustertools by Means of Dynamic Tool Simulation
(Sprache: Englisch)
Cluster tools have become an important tool type in the semiconductor industry duringthe last decade. They integrate several process chambers into a tool and enablesequential process steps within one tool and/or increase capacity and availability byusing...
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Cluster tools have become an important tool type in the semiconductor industry duringthe last decade. They integrate several process chambers into a tool and enablesequential process steps within one tool and/or increase capacity and availability byusing several chambers in parallel for the same step. In these cluster tools, severalchambers are usually served by one robot. Different process times and the parallelismof the chambers lead to practically random and competing transport tasks andtherefore to a dynamic sequence of events. Therefore a static capacity analysis is ofteninsufficient and the deduction of improvement potentials requires complex analysisof the sequence of transport job executions. Besides external influences like the instantof the next delivery of a lot can change the ranking of different optimizationcriteria and temporarily favor a different sequencing rule. Commercially availablesimulation programs for semiconductor cluster tools are limited in the variety of sequencingrules and do not support such an analysis to the necessary extent.
Autoren-Porträt von Jozsef Daniel Benke, Jozsef D. Benke
Benke, Jozsef DanielJózsef Dániel Benke obtained his Diplomas in 2006, in Software Engineering-Mathematics at Scientific University of Szeged, Hungary and also in Computational Logic at Technical University of Dresden, Germany.. He worked on different Projects at Advanced Micro Devices at the Industrial Engineering at Siemens AG Automation&Drives Department.
Bibliographische Angaben
- Autoren: Jozsef Daniel Benke , Jozsef D. Benke
- 2008, 104 Seiten, Masse: 15 x 22 cm, Kartoniert (TB), Englisch
- Verlag: VDM Verlag Dr. Müller e.K.
- ISBN-10: 3639032543
- ISBN-13: 9783639032543
Sprache:
Englisch
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